WVCP6000 Vai Ausa Cryopump Cryogenic Faiga Pusa

WVCP6000 Vai Ausa Cryopump Cryogenic Fa'a'aisa faiga Fa'aalia Ata

Fa'amatalaga Puupuu:

Vave vave
Mailei malulu fa'alili ile -135℃
Fa'aitiitia Taimi o Pamu ile 25% ile 50%
Fa'aitiitia le mana fa'aaoga
La'ititi a'afiaga o le si'osi'omaga, leai se CFC ma HCFC

Auina imeli ia matou

Fa'amatalaga Oloa

Faailoga o oloa

Fa'amatalaga o oloa

Guangzhou Xieyi Automation Technology Co., Ltd., lea na faavaeina i le 2011, o le pisinisi tulaga ese maualuga-tekonolosi i Saute Saina lea e auai i le atinaeina o suesuega, gaosiga, feutagaiga faatekinolosi ma le auaunaga mo le ultra-maualalo vevela vai ausa pueina pamu ma isi. meafaigaluega vevela ultra-maualalo.

XIEYI WVCP Cryochillers ua tapunia matasele cryogenic refrigeration faiga e maua ai 550 watts ~ 6,000 watts o cooling.O nei cryochillers e mafai ona fa'aoga e pu'e ai ausa vai ma isi mea fa'afefete e ala i le fa'aisa i luga o se mea malulu e pei ole Meissner coil (cryocoil).WVCP cryochillers o loʻo faʻaaogaina foi e faʻamalo ai mea e pei o chucks electrostatic faʻaaogaina i le gaosiga o le semiconductor wafer.

Fua Fa'atekinisi

Fa'ata'ita'iga	WVCP6000-SH	WVCP6000-DH
Maualuluga o le malulu (W)	6000	6000
Ole manatu ole maualuga ole pamu ole mailei malulu (L/S)	588000	588000
Ole talitonuga ole saoasaoa maualuga ole mailei malulu (L/S)	882000	882000
Vacuum mulimuli(mbar)	2*10-8	2*10-8
Taimi fa'a'aisa o le pito maualuga o le mailei malulu (min)	<5	<5
Fetuuna'i tulaga o le vevela vevela(℃)	-20~30	-20~30
Faiga pulea o le mamafa	Fa'amatalaga fa'akomepiuta + Kilia fa'ainisinia	Fa'amatalaga fa'akomepiuta + Kilia fa'ainisinia
Fa'atosina toe fa'afo'i paleni galuega mamafa (QRBP)	Ioe	Ioe
Suau'u poloka fa'amaoniga galuega (OBP)	Ioe	Ioe
4G Pule mamao	Ioe	Ioe
O meatotino a le aufaasālalau malulu	Pro-siosiomaga	Pro-siosiomaga
Ole pito maualuga ole mailei malulu tubular(㎡)	4	4
Ole pito pito maualuga ole mailei malulu (㎡)	6	6
Fa'amatalaga ole mailei malulu tasi(㎡)	φ16mm*80m	/
Fa'amatalaga o mailei malulu lua(㎡)	/	2φ16mm40m
fa'aoga kesi	12.7 kopa uelo so'oga(Tulaga masani)	12.7 kopa uelo so'oga(Tulaga masani)
fa'aoga kesi	ParkerCPI/VCR(Filifili)	ParkerCPI/VCR(Filifili)
Suavai malulu (L / Min i le 24 ℃)	48	48
Suavai mālūlū vevela vevela(℃)	38	38
Olo mālūlū	Ioe	Ioe
So'oga vai malulu(L/S)	G1”	G1”
Malosi maualuga o le uta (kW)	25.3	25.3
Malosi fa'atatau ole komi (HP)	20	20
Malosiaga (50HZ)	380-400V AC 3P(H)	380-400V AC 3P(H)
Malosiaga (50HZ)	200-230V AC 3P(L)	200-230V AC 3P(L)
Fua(MM)	935(L)873(D)1809(H)	1235(L)873(D)1809(H)
mamafa(KG)	655	655